Triple Axis Positioners
XY100A/Z25A
The XY100A/Z25A is a closed-loop XYZ nanopositioner with 100µm x 100µm x 25µm range of motion and extremely low out-of-plane motion. It combines the XY100A and Z25A nanopositioners. It has the highest resonant frequency available in the market for products of similar function. It is designed with an integrated kinematic mounting mechanism to decouple the distortion due to thermal effects and piezo driving force. This maintains position accuracy.
100µm x 100µm x 25µm travel
Nanometer resolution
Closed-loop capacitive feedback
Kinematic mounting to eliminate thermal drift
Extremely low out-of-plane motion
Application Examples:
Optical Microscopy
Scanning Probe Microscopy
Optical Fiber Alignment
Metrology
Nanometer-scale Manipulation
Lithography